Publication
CONTRIBUTED PAPERS & ABSTRACTS of INVITED LECTURES, TOPICAL INVITED LECTURES and PROGRESS REPORTS: 32nd SUMMER School and International Symposium on the Physics of Ionized Gases, August 26 - 30, 2024, Belgrade, Serbia
Editors: Editors: Bratislav Obradović, Jovan Cvetić, Miroslav Kuzmanović and Nikola Cvetanović
Editors: Editors: Bratislav Obradović, Jovan Cvetić, Miroslav Kuzmanović and Nikola Cvetanović
Autors
A. Miakonkikh, V. Kuzmenko and K. Rudenko
Title
FLUOROCARBON POLYMERIZING PLASMAS ETCHING PROCESSES FOR STRUCTURES OF MICRELECTRONICS
