THE FORMATION OF MICRONEEDLES STRUCTURES FROM SILICON USING PLASMA ETCHING IN SF6/O2 MIXTURE IN INDUCTIVELY COUPLED PLASMA
Publication
CONTRIBUTED PAPERS & ABSTRACTS of INVITED LECTURES, TOPICAL INVITED LECTURES and PROGRESS REPORTS: 32nd SUMMER School and International Symposium on the Physics of Ionized Gases, August 26 - 30, 2024, Belgrade, Serbia
Editors: Editors: Bratislav Obradović, Jovan Cvetić, Miroslav Kuzmanović and Nikola Cvetanović
Editors: Editors: Bratislav Obradović, Jovan Cvetić, Miroslav Kuzmanović and Nikola Cvetanović
Autors
Vitaly Kuzmenko, Andrey Miakonkikh and Konstantin Rudenko
Title
THE FORMATION OF MICRONEEDLES STRUCTURES FROM SILICON USING PLASMA ETCHING IN SF6/O2 MIXTURE IN INDUCTIVELY COUPLED PLASMA
