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Serbian Astronomical Journal

MICRO HOLLOW CATHODE DISCHARGES IN ARGON/NITROGEN USED FOR BORON NITRIDE PECVD

Publication

CONTRIBUTED PAPERS & ABSTRACTS of INVITED LECTURES, TOPICAL INVITED LECTURES and PROGRESS REPORTS: 32nd SUMMER School and International Symposium on the Physics of Ionized Gases, August 26 - 30, 2024, Belgrade, Serbia
Editors: Editors: Bratislav Obradović, Jovan Cvetić, Miroslav Kuzmanović and Nikola Cvetanović

Autors

C. Lazzaroni, A. Remigy, M. Jacquemin, H. Kabbara, S. Kasri, B. Menacer, K. Gazeli, V. Mille and G. Lombardi

Title

MICRO HOLLOW CATHODE DISCHARGES IN ARGON/NITROGEN USED FOR BORON NITRIDE PECVD
CONTRIBUTED PAPERS & ABSTRACTS of INVITED LECTURES, TOPICAL INVITED LECTURES and PROGRESS REPORTS: 32nd SUMMER School and International Symposium on the Physics of Ionized Gases